Academic Catalog

PHYS535 FUNDAMENTALS OF SILICON TECHNOLOGY I

Course Code: 2300535
METU Credit (Theoretical-Laboratory hours/week): 3(3-0)
ECTS Credit: 8.0
Department: Physics
Language of Instruction: English
Level of Study: Graduate
Course Coordinator: Prof.Dr. RAÞÝT TURAN
Offered Semester: Fall or Spring Semesters.

Course Content

Basic processes: oxidation. doping. silicon thin film growth (amorphous. polycrystalline. single- crystalline).