Academic Catalog

PHYS535 FUNDAMENTALS OF SILICON TECHNOLOGY I

Course Code: 2300535
METU Credit (Theoretical-Laboratory hours/week): 3(3-0)
ECTS Credit: 8.0
Department: Physics
Language of Instruction: English
Level of Study: Graduate
Course Coordinator:
Offered Semester: Fall or Spring Semesters.

Course Content

Basic processes: oxidation, doping, silicon thin film growth (amorphous, polycrystalline, single- crystalline).