METE718 MICRO AND NANOFABRICATION
| Course Code: |
5700718 |
| METU Credit (Theoretical-Laboratory hours/week): |
3(3-0) |
| ECTS Credit: |
5.0 |
| Department: |
Metallurgical And Materials Engineering |
| Language of Instruction: |
English |
| Level of Study: |
Graduate |
| Course Coordinator: |
|
| Offered Semester: |
Fall or Spring Semesters. |
Course Content
Fundamentals of processes and technology of micro/nano fabrication; silicon and other novel semiconductors processing; vacuum systems; thin film deposition; lithography; bottom-up and top-down approaches; aqueous fabrication routs; substrates and cleanliness.
