Academic Catalog

CHE447 CHEMICAL PROCESSES IN MICROELECTRONICS

Course Code: 5630447
METU Credit (Theoretical-Laboratory hours/week): 3(3-0)
ECTS Credit: 5.0
Department: Chemical Engineering
Language of Instruction: English
Level of Study: Undergraduate
Course Coordinator: Prof.Dr. DENZ NER
Offered Semester: Fall Semesters.

Course Content

Introduction to microelectronics processing. Silicon Refining. Crystal growth. Chemical rate processes and kinetics. Chemical vapor deposition incorporation and transport of dopants. Physical and physico-chemical rate processes. Design of chemical reactors and process equipment used in microelectronics manufacturing.