CHE447 CHEMICAL PROCESSES IN MICROELECTRONICS
| Course Code: |
5630447 |
| METU Credit (Theoretical-Laboratory hours/week): |
3(3-0) |
| ECTS Credit: |
5.0 |
| Department: |
Chemical Engineering |
| Language of Instruction: |
English |
| Level of Study: |
Undergraduate |
| Course Coordinator: |
Prof.Dr. DENÝZ ÜNER |
| Offered Semester: |
Fall Semesters. |
Course Content
Introduction to microelectronics processing. Silicon Refining. Crystal growth. Chemical rate processes and kinetics. Chemical vapor deposition incorporation and transport of dopants. Physical and physico-chemical rate processes. Design of chemical reactors and process equipment used in microelectronics manufacturing.
