ME448 FUNDAMENTALS OF MICRO ELECTROMECHAN.SYST.&MICROSYST.
| Course Code: |
5690448 |
| METU Credit (Theoretical-Laboratory hours/week): |
3(3-0) |
| ECTS Credit: |
5.0 |
| Department: |
Mechanical Engineering |
| Language of Instruction: |
English |
| Level of Study: |
Undergraduate |
| Course Coordinator: |
Assoc.Prof.Dr. KIVANÇ AZGIN |
| Offered Semester: |
Fall and Spring Semesters. |
Course Content
Introduction; overview of Micro Electromechanical Systems (MEMS) and microsystems. Working principles of microsystems. Engineering science and engineering mechanics topics for Microsystems design and fabrication. Application of thermofluid engineering principles in microsystems design. Scaling laws and miniaturization. Materials for MEMS and microsystems. Microsystem manufacturing processes. Microsystem design and packaging.
