Academic Catalog

ME448 FUNDAMENTALS OF MICRO ELECTROMECHAN.SYST.&MICROSYST.

Course Code: 5690448
METU Credit (Theoretical-Laboratory hours/week): 3(3-0)
ECTS Credit: 5.0
Department: Mechanical Engineering
Language of Instruction: English
Level of Study: Undergraduate
Course Coordinator: Assist.Prof.Dr KIVAN AZGIN
Offered Semester: Fall and Spring Semesters.

Course Content

Introduction; overview of Micro Electromechanical Systems (MEMS) and microsystems. Working principles of microsystems. Engineering science and engineering mechanics topics for Microsystems design and fabrication. Application of thermofluid engineering principles in microsystems design. Scaling laws and miniaturization. Materials for MEMS and microsystems. Microsystem manufacturing processes. Microsystem design and packaging.